National MEMS Design Lab


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MEMS Design Tools




The COMSOL Multiphysics simulation software environment facilitates all steps in the modeling process − defining your geometry, meshing, specifying your physics, solving, and then visualizing your results.




CoventorWare is comprised of four major modules that can be used individually to complement an existing design flow, or jointly to provide a complete MEMS design flow. These include Architect, Designer, Analyzer and Integrator. The completeness of the tool suite and the high level of integration among the modules improves overall efficiency and ease of use, freeing users from the burden of manually transferring design data among multiple, stand-alone tools.




IntelliSuite is a tightly integrated design environment that will link your entire MEMS organization together. Built to scale from a point tool to an organization-wide tool, IntelliSuite unifies various engineering and manufacturing tasks into a single living design environment.